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ACT Node and WA Node

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Quick Bites from the ACT Node

December 2011

The ACT Node has extended the range of equipment funded via EIF or NCRIS to include the following small tools to supplement existing flagship equipment:

The Node is also investigating the purchase of an advanced Plasma-assisted Atomic Layer Deposition (PA-ALD) that covers oxides (Al2O3, SiO2, TiO2, ZnO), nitrides (TiN) and pure metals (Ag, Au). The latter is crucial for contacting nano-wires, a main research topic at EME/RSPE. Also a spectral ellipsometer is under consideration covering the range of 190-2100nm making it suitable for the upcoming MOCVD reactor for GaN and related materials.

We have also continued to work on improving the range of processes/services offered to the research community: