ANFFL logo - go to ANFFL Home Australian National Fabrication Facility

ACT Node and WA Node

Latest News

Latest Tool Arrival - JA Woollam M-2000D Spectral Ellipsometer - ACT Node

June 2013

M-2000D Ellipsometer  

The ACT Node has recently taken delivery and commissioned a new piece of kit in our EBL Laboratory - a Spectral Ellipsometer. The JA Woollam M2000D Ellipsometer allows accurate measurements of refractive index and thickness of various types of layers spanning dielectrics, semi-conductors and thin metal films. Some of the system features are:

The system is supported by powerful software to analyse data with possibility of various models such as Cauchy or Tauc-Lorentz models. The system resolution is as small as 1nm (semiconductor native oxide can be measured). Through May, we held three two-hour training sessions (12 people in total - see photographs) for this new piece of equipment, with more to be scheduled as required. This ellipsometer complements the existing instrument at the WA Node that has a spectral range of 2-20µm.

Training session 1 training session 2 training session 3
Session One - left to right: Tran Tuan,
Sam Turner, Yuanjing Shen,
Azul Osorio Mayon and Kaushal Vora (ANFF).
Session Two - left to right: Kidane Belay, Sanjoy Nandi, Xinjun Liu and
Kaushal Vora.
Session Three - left to right: Sukhanta Debbarma, Xin Gai, Duk-Yong Choi, Khu Vu and
Kaushal Vora (again)