Mission

To offer a state-of-the-art facility and processing capabilities open to all scientists and researchers in Australia and overseas to help realise outstanding research in materials and/or devices requiring sub-micrometre feature size for applications in, though not restricted to, photonics/opto-electronics

The Australian National Fabrication Facility - ACT and WA Nodes are two of eight facilities established by the ANFF under the National Collaborative Research Infrastructure Strategy (NCRIS) to provide researchers and industry with access to state-of-the-art fabrication facilities. The nodes, which are located across Australia, draw on existing infrastructure and expertise and each offers a specific area of expertise including advanced materials, nano-electronics, photonics and bio-nano applications.

Our facilities house an array of state-of-the-art equipment that enables research in the development and fabrication of micro/nano-photonic related devices, photonic crystals and waveguides, primarily focused on III-V and II-VI compound semi-conductor materials. Node flagship equipment and services available include Electron Beam Lithography, Electron Beam/Thermal Evaporation, Focused Ion Beam, Inductively Coupled Plasma Etching, Plasma Enhanced Chemical Vapour Deposition, Nano Imprint Lithography/Hot Embossing and a Sputter Coater system. We are continuing to extend these capabilities by purchasing additional state-of-the-art equipment enabling further research and development in micro/nano-technology.

Please browse our website and feel free to contact us regarding any of our services, processes and capabililities and how they may be of benefit to your reseach, project or device/material development.

We look forward to working with you soon.
Dr Fouad Karouta & Res. Prof. Mariusz Martyniuk.

ACT Node Facility
Research School of Physics & Engineering
The Australian National University
Canberra ACT 0200
Australia
T: +61 2 6125 7174
F: +61 2 6125 0511
E: ANU Facility Manager

WA Node Facility
School of Electrical, Electronic & Computer Engineering
The University of Western Australia
Crawley WA 6009
Australia
T: +61 8 6488 1905
F: +61 8 6488 1095
E: UWA Facility Manager