Safety, Policy & Pricing
Quick links to the following:
New Contact/Booking Request Form - online (opens new window/tab)
Safety & Emergency Information
User Feedback Form - online (opens new window/tab)
WHS Risk Assessments for ANFF ACT nodes labs
Safety & Emergency Information
Before accessing the facilities all users MUST complete a formal induction webinar and complete the 'Laboratory Induction and Authorisation Form'. Click here for the induction webinar, please note there will be a lab tour to finish the induction.
This outlines the specific induction and authorisation requirements for the ANFF laboratories located in the Weigold Building (W2.05 and W2.06). It lists the generic risk controls established for the laboratory. New or modified tasks to be carried out in the laboratory require further formal risk assessment and subsequent approval. In addition, training will be provided for plant, equipment and safe working practices.
The Laboratory Induction and Authorisation Form MUST be completed and signed before access to the laboratory is granted.
It is also vital that all users familiarise themselves with the ANFF Laboratory Emergency Procedures as this document gives general information on the layout of the laboratories and associated facilities. There are also clear procedures on what to do in the event of any alarms being activated.
WHS Risk Assessments of ANFF ACT Node Laboratories
| Building | Lab | Risk Assessment | After-hours SWP | SOP/IM | SOP/IM | SOP/IM |
|---|---|---|---|---|---|---|
| Huxley 56 | H4.30 | RA | SWP_AH Sputter | Sputter | Mask Aligner | Electro Pl. |
| JCSMR 131 | 131_1.147 | RA | ||||
| Weigold 58B | W2.04 | RA | ||||
| Weigold 58B | W2.05 | RA | SWP_AH E-beam Evap | |||
| Weigold 58B | W2.06 | RA | SWP_AH EBL | |||
| Carver 58C | W2.06 | RA | ||||
| Carver 58C | W2.06 | RA | ||||
| Nuclear 58A | A201/201A | RA | ||||
| Nuclear 58A | A107/108 | RA |
Abbreviations:
Risk Assessment (RA) | Safe Work Procedure for After-Hours work (SWP_AH) | Safe Operating Procedure (SOP) | Instruction Manual (IM)
Pricing Information
The ANFF reviews it's Access & Pricing Policy each year and due to the diversity of services offered by the Nodes they all vary. The table below shows the revised rates for equipment/services at the ACT Node, starting from April 2023.
| Tool/Equipment/Service | University or PFRA1 Researcher unassisted / assisted |
Australian Industry (International User2) unassisted / assisted |
|---|---|---|
Flagship Tools |
$60/$110 per hour |
$150/$250 per hour ($250/$350 per hour) |
Major Tools (EBL3, SEM-CL, EBeam Evap, ICP-CL, ICP-F, Suss MA, NIL/HE, P-ALD, PECVD, Thermal Evaporator, Hot Embosser, Sputter, AFM5) |
$50/$100 per hour |
$150/$250 per hour |
Small Processing Tools (SPT) (eg. Barrel Etcher, Ellipsometer, Rapid Thermal Annealer, Surface Profiler, Vacuum Oven, Wire Bonder, Flip-chip Bonder) |
$20/$70 per hour |
$70/$170 per hour |
General assistance |
$50 per hour |
$100 per hour |
General consumables |
At cost |
At cost |
Precious metals | $1.50 per nm |
$1.50 per nm |
Precious metals | time < 20 min: no charge |
time < 20 min: no charge |
Materials in P-ALD |
$10/hour |
$10/hour |
1) PFRA are Australia's Publicly Funded Research Agencies: CSIRO, ANSTO, AIMS and DSTO.
2) International users can apply to the Node Manager for a discount on PRE-PAYMENT of bulk access time.
The discount only applies to 'unassisted access'.
3) The FIB and EBL are tools that have a minimum booking of 1hr. If only 1/2 hr is booked, it will be billed as one hour.
4) The hourly rate is charged pro rata, in 1min increments. Example: 45mins costs $67.50 (=45/60*$90).
5) AFM consumables (each): 'normal' cantilever $50,-; 'special' cantilever $80,-; cantilever gel-box: $15,-
The full ANFF Access & Pricing Policy document is available on the ANFF headquarters website here.
EBL Booking Policy
The use of the E-beam Lithography (EBL) system is quite heavy sometimes making it difficult to get a time-slot less than 1-2 weeks in advance. New rules have been formulated in order to use the system time more effectively. Please follow the following guidelines when making EBL bookings.
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Weekdays are separated by two 4-hour sessions per weekday, morning 09:00-13:00 and afternoon 13:00-17:00. These two time slots put a cut-off at 13:00. If you need less time, please book only that time during each time-slot. Booking longer than 4 hours should either start at 9:00 (or earlier) or 13:00 (strict). Minimum 1hr for a booking.
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More than one booking per user per day is NOT allowed.
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After 17:00 bookings are more flexible which is very feasible for longer exposure. It will be very convenient if users doing overnight bookings could start as late as possible - e.g. starting at 19:00 would give other users opportunity to extend the afternoon session for longer exposures.
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During weekends (Fri 18:00 - Mon 08:00) booking is fully flexible. Feel free to book any time slot of your choice.
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Always report a booking that cannot be used AS SOON AS POSSIBLE! Use these mail addresses to reach to ANFF staff Gayatri.Vaidya@anu.edu.au or Kaushal.Vora@anu.edu.au