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Safety, Policy & Pricing

Quick links to the following:

 

Current Access & Pricing Policy - ANFFL website (opens new window/tab)

 

EBL Booking Policy

 

New Contact/Booking Request Form - online (opens new window/tab)

 

Pricing Information

 

Safety & Emergency Information

 

User Feedback Form - online (opens new window/tab)

 

 

Safety & Emergency Information

 

Before accessing the facilities all users MUST attend a formal induction session and complete the 'Laboratory Induction and Authorisation Form'. For reference you can access a PDF copy of the PowerPoint file used at the induction sessions here.

 

This outlines the specific induction and authorisation requirements for the ANFF laboratories located in the Weigold Building (W2.05 and W2.06). It lists the generic risk controls established for the laboratory. New or modified tasks to be carried out in the laboratory require further formal risk assessment and subsequent approval. In addition, training will be provided for plant, equipment and safe working practices.

 

The Laboratory Induction and Authorisation Form MUST be completed and signed before access to the laboratory is granted.

 

It is also vital that all users familiarise themselves with the ANFF Laboratory Emergency Procedures as this document gives general information on the layout of the laboratories and associated facilities. There are also clear procedures on what to do in the event of any alarms being activated.

 

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Pricing Information

 

The ANFF reviews it's Access & Pricing Policy each year and due to the diversity of services offered by the Nodes they all vary. The full ANFF Access & Pricing Policy document is available on the ANFFL website here.

 

Below is a table showing the current charge rates for equipment/services at the ACT Node.

 

Tool/Equipment/Service

University/PFRA Researcher

Industry/International User*

Focused Ion Beam (FIB), MOCVD (GaN & GaAs systems) - unassisted/assisted

$50.00/$100 per hour

$100.00/$150.00 per hour

All other NCRIS Flagship equipment (EB Evap, EBL, ICP, NIL/HE, P-ALD, PECVD & SEM-CL - unassisted/assisted

$40.00/$90.00 per hour

$100.00/$150.00 per hour

Sputter ONLY - unassisted/assisted

$20.00/$70.00 per hour (plus $20 booking fee)

$100.00/$150.00 per hour

(plus $20 booking fee)

Small Processing Tools (eg. Barrel Etcher, Ellipsometer, Flip-chip Bonder, Rapid Thermal Annealer, Surface Profiler & Thermal Evaporator) - unassisted/assisted

Free of charge/$50.00 per hour

$50.00/$100.00 per hour

General assistance

$50.00 per hour

$50.00 per hour

General consumables - wafers, sample boxes etc

At cost

At cost

Precious metals - Gold (Au), Platinum (Pt) in EB Evap

Precious metals - Gold (Au), Platinum (Pt) in Sputter

Precious metals - Paladium (Pd) in EB Evap

Precious metals - Paladium (Pd) in Sputter

$1.00 per nm

$1.00 per nm

$0.50 per nm

$0.50 per nm

$1.00 per nm

$1.00 per nm

$0.50 per nm

$0.50 per nm

 

* SPECIAL NOTE - Industry and international users can apply to the Node Manager for discounts for PRE-PAYMENT of bulk access time. The discount applies only to unassisted access, however payment can be applied to all other charges other at regular rates/costs.

 

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EBL Booking Policy

 

The use of the E-beam Lithography (EBL) system is quite heavy sometimes making it difficult to get a time-slot less than 1-2 weeks in advance. New rules have been formulated in order to use the system time more effectively. Please follow the following guidelines when making EBL bookings.

 

  1. Weekdays are separated by two 4-hour sessions per weekday, morning 09:00-13:00 and afternoon 13:00-17:00. These two time slots put a cut-off at 13:00. If you need less time, please book only that time during each time-slot. Booking longer than 4 hours should either start at 9:00 (or earlier) or 13:00 (strict).

  2. More than one booking per user per day is NOT allowed.

  3. After 17:00 bookings are more flexible which is very feasible for longer exposure. It will be very convenient if users doing overnight bookings could start as late as possible - e.g. starting at 19:00 would give other users opportunity to extend the afternoon session for longer exposures.

  4. During weekends (Fri 18:00 - Mon 08:00) booking is fully flexible. Feel free to book any time slot of your choice.

  5. Always report a booking that cannot be used AS SOON AS POSSIBLE! Use these mail addresses to reach to ANFF staff fouad.karouta@anu.edu.au or naeem.shahid@anu.edu.au.

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