Access Policy

To access our fabrication capabilities, please contact us to discuss your project requirements. There is a choice of direct access to our equipment (unassisted rates), after the mandatory University registration (for all stafff, students, visitors, collaborators, etc.), laboratory inductions, safety training and equiment specific user training. Alternatively, if you are pressed for time and resources to do it yourself, our experienced process eningeering team at ANFF can provide you with the service to get the job done for you (assisted rates). Whatever works best for you, just let us know.

Please do not hesitate to get in contact with us:

Dr. Horst Punzmann - Node Manager
Dr. Kaushal Vora - Technical and Process Manager

Pricing Information

The ANFF reviews it's Access & Pricing Policy each year and due to the diversity of services offered by the Nodes they all vary. The table below shows the revised rates for equipment/services at the ACT Node, starting from July 2024.

Tool/Equipment/Service	University or PFRA¹ Researcher unassisted / assisted	Australian Industry (International User²) unassisted / assisted
Flagship Tools FIB³ and MOCVD (all InP, GaN, GaAs systems)	$60/$110 per hour	$150/$250 per hour ($250/$350 per hour)
Major Tools (EBL³, SEM-CL, EBeam Evap, ICP-CL, ICP-F, Suss MA, NIL/HE, P-ALD, PECVD, Thermal Evaporator, Hot Embosser, Sputter, AFM⁵)	$50/$100 per hour	$150/$250 per hour
Small Processing Tools (SPT) (eg. Barrel Etcher, Ellipsometer, Rapid Thermal Annealer, Surface Profiler, Vacuum Oven, Wire Bonder, Flip-chip Bonder)	$20/$70 per hour	$70/$170 per hour
General assistance	$50 per hour	$100 per hour

General consumables wafers, sample boxes, etc.	At cost
Precious metals Gold (Au) in Ebeam Evaporator / Sputter Gold (Au) in Thermal Evaporator Platinum (Pt), Palladium (Pd)	$4.50 per nm $2.00 per nm $2.00 per nm
Precious metals in Focused Ion Beam (FIB): Platinum (Pt)	time < 20 min: no charge time > 20 min: $90/hour⁴
Materials in P-ALD	$10/hour

¹⁾ PFRA are Australia's Publicly Funded Research Agencies: CSIRO, ANSTO, GA, AIMS, NMI and DSTO.

²⁾ International users can apply to the Node Manager for a discount on PRE-PAYMENT of bulk access time.
The discount only applies to 'unassisted access'.

³⁾ The FIB and EBL are tools that have a minimum booking of 1hr. If only 1/2 hr is booked, it will be billed as one hour.

⁴⁾ The hourly rate is charged pro rata, in 1min increments. Example: 45mins costs $67.50 (=45/60*$90).

⁵⁾ AFM consumables (each): 'normal' cantilever $50,-; 'special' cantilever $80,-; cantilever gel-box: $15,-

More details can be found on the ANFF headquaters web site in the 'Access, Pricing and Client Services Policies' document.