Prof. Hark Hoe Tan
Node Director

Hoe received his B.E. (Hons) in Electrical Engineering from the University of Melbourne in 1992, after which he worked with Osram in Malaysia as a quality assurance engineer. In 1997, he was awarded the PhD degree from the Australian National University for his dissertation on "Ion beam effects in GaAs-AlGaAs materials and devices". He has been the past recipient of the Australian Research Council Postdoctoral, QEII and Future Fellowships. He has contributed over 450 journal papers and 6 book chapters. He is also a co-inventor in 4 US patents related to laser diodes and infrared photodetectors.

Hoe's research interests include epitaxial growth of low-dimensional compound semiconductors, nanostructured optoelectronic devices, and ion beam processing of compound semiconductors for optoelectronic device applications. Hoe is a Fellow of IEEE and was the past Distinguished Lecturer for IEEE Nanotechnology Council and IEEE Photonics Society. He holds honorary appointments at Hefei University of Technology and Nanjing University.

Dr Horst Punzmann
Node Manager

Horst studied electrical engineering at the University of Applied Sciences: OTH Regensburg and worked as system integration engineer at Siemens Automotive, Germany, on the design of airbag and motor management ASIC chipsets. He did his PhD in Plasma Physics at ANU and worked on micowave plasma heating, plasma spectroscopy for the study of plasma and hydrodynamic turbulence.

Horst is interested in fluid mechanics and continued research in 2D fluid turbulence, nonlinear wave/flow-interactions and helped to develop liquid-metamaterials and biofluid experiments. His collaborative work led to high-quality journal publications and attracted competitive funding for ARC Discovery Projects and industrial collaborations.

Ms Sue Berkeley
Node Administrator

Sue Berkeley previously worked at the John Curtin School of Medical Research, ANU in Administrative positions in the Division of Biochemistry and Molecular Biology, and the Purchasing Department.

Dr Kaushal Vora
Operations and Processes Manager

Kaushal Vora received his BE in Electrical Engineering in 1996 from Saurashtra University, India. He then earned a Masters degree in Microsystems Technology in 2004 from Swinburne University of Technology, Australia. His master’s thesis was focused on integrating microfludic channel with an optical waveguide to create a low-cost biosensor. He acquired PhD degree in 2009 from La Trobe University, Australia during which he developed processes to fabricate densely-packed high aspect-ratio microstructures using x-ray lithography. He worked as an Research Officer at La Trobe University, whereby, he was involved in design, fabrication and testing of x-ray optics for phase-contrast imaging using µ-XCT.

Kaushal joined The Australian National University (ANU) in 2009 as a process engineer for ANFF ACT Node. Since then, he has developed a wide range of processes for our flagship equipment that includes Electron Beam/Thermal Evaporator, Inductively Coupled Plasma Etching, Nano Imprint Lithography/Hot Embossing, Plasma Enhanced Chemical Vapour Deposistion and our Sputter system.

Kaushal’s research interests includes micro/nano fabrication of silicon and III-V based devices, thin-film deposition and patterning of metal and insulator layers, optical waveguides, solar-cell devices, p-silicon nanowire growth and nano-replication techniques.

Dr Li (Lily) Li
FIB Process Engineer

Li Li completed her PhD in Material Physics in August 2012 at The University of Sydney. Prior to commencing at the ANFF in March 2013, Li Li was a Research Assistant at the Australian Centre for Microscopy & Microanalysis (ACMM) at The University of Sydney, where she had opportunity to operate a wide range of advanced instruments, especially the sophisticated FIB/SEM, TEM and 3D atom probe.

Li Li's PhD project was focused on understanding the relationship between the magnetic properties and microstructure of Co doped ZnO semiconductors, which involved extensive usage of dual-beam FIB/SEM for cutting, etching, annular milling, lift-out and other processes. Li Li also used the FIB to contribute to many collaborative projects, such as preparing TEM specimens for Mg-doped ZnO multilayered thin films, fabricating nanoscale patterns on Si substrates, preparing needle-shaped K-doped BaFe₂As₂ superconductor specimens, and lifting-out carbon nanotubes.

At ANFF, Li Li is responsible for Helios NanoLab 600 Dualbeam FIB flagship equipment. Her research interest includes nanostructured materials, nanotechnology, nanostructure characterisation, and new development of FIB technology.

Dr Olivier Lee Cheong Lem
Microanalysis Research Officer/SEM Process Engineer

Olivier completed his PhD at the University of Technology Sydney in 2014 where his research was focused on the optical properties of semiconductors. He then took on a research assistant position at the Microstructural Analysis Unit at UTS where he was responsible for the maintenance and development of the CL/PL system. Olivier joined the ANFF ACT Node in 2019 as a Cathodoluminescence/Processing Officer where he is responsible for the FESEM-CL system.

His research interests include optical spectroscopy of wide bandgap materials and plasmonic materials.

Dr Mykhaylo Lysevych
MOCVD Senior Process Engineer

Mykhaylo received his BE from LPNU in Ukraine. He joined the Department of Electronic Materials Engineering at The Australian National University as an MPhil student working on novel designs of laser diodes. After completing MPhil he pursued with semiconductor laser research as a PhD student.

He joined the ANFF ACT Node as an MOCVD Process Engineer in 2013, where he attends to three MOCVD reactors (two As/P MOCVD reactors and one GaN MOCVD reactor) and two labs.

His research interests include epitaxial growth, lasers, LEDs, optical waveguides.

Ms Gayatri Vaidya
EBL Process Engineer

Gayatri's core background is in Physics and specialization in Instrumentation Science from University of Pune, India.

Before joining ANU as a Research Officer (EBL), Gayatri managed Raith 150-Two and EVO18 SEM tools as a Project Engineer at the Center of Excellence in Nano-electronics, Department of Electrical Engineering, Indian Institute of Technology Bombay (IITB), Powai since 2003. At IITB, Gayatri guided research scholars on MEMS, NEMS, Optical Waveguides, Structural Colors, Nanopillars, EBID techniques on CNT’s, as well as developed in-house processes, policies, and optimum operational efficiency protocols for tools in the nano-fabrication labs.

At ANFF, Gayatri is responsible for Raith 150 Electron Beam Lithography Flagship Equipment. Gayatri's research interests include Micro / Nanofabrication of Silicon-based devices, Nanotechnology, Electron Microscopy, and developing novel methods in EBL.

Dr Naiyin Wang
Process Engineer

Naiyin was awarded a PhD degree in Physics/Materials Science from the Australia National University in February 2021. His PhD projects were devoted to epitaxial growth and characterisation of III-V semiconductor nanostructures with novel shapes for optoelectronic applications. Soon after, Naiyin joined the Australian Research Council Centre of Excellence for Transformative Meta-Optical Systems (TMOS) at the ANU, working as a Postdoctoral Fellow on research areas including epitaxy of III-V nanostructures, semiconductor optoelectronics, III-V quantum dots single-photon emitters, and nanofabrication. During his time, Naiyin managed complex optical characterisation tools such as two PL systems and one Raman system, including user training, maintenance and scientific support regarding optical characterisation of compound semiconductors.

Naiyin joined the ANFF ACT Node as a process engineer in September 2022. His research interests include epitaxial growth and characterisation of low-dimensional compound semiconductors, semiconductor optoelectronics and micro/nano-fabrication.

Mr Jnaneswara (John) Rao Saladi
Technical Officer

John completed Industrial Engineering in Singapore. He worked more than 10 years in manufacturing advanced materials, design, and equipment maintenance in Singapore.

Prior to joining ANFF ACT Node, John took on a Technical Officer position in College of Engineering ANU where he was responsible for the Technical support to the users and Maintenance of research tools. Then he joined the ANFF ACT Node as a Technical Officer where he is responsible for equipment maintenance, troubleshooting and general infrastructure support.