ACT on the move into the new cleanroom laboratory
Equipment status
lastest update as of 10 April 26AFM Mask aligner NIL EVG620 Barrel etcher PVA Mask aligner MA6 Bonder (wire) Westbond Microscope (Huxley litho) Bonder (flip-chip) Finetech N2 Glove box Diamond Scriber Ovens Heraeus Direct LW MLA150 Plasma cleaner Diener Zepto Electro-plating Parylene P6 coater E-beam Evap Plasma ALD Ellipsometer JA Woollam Plasma vapour deposition PECVD EBL – Elionix Thermal Annealer RTA 1 EBL – Raith Thermal Annealer RTA 2 FIB FEI Helios Sputter AJA International Hot Embosser EVG520 Sputter Denton Desk V ICP-F Surface Profiler Bruker ICP-Cl Spinner/Fume hoods (Huxley litho) MOCVD #1 SEM-CL FEI Verios MOCVD #2 Thermal Evaporator MOCVD #3 Vacuum oven The tools maked in GREEN colour are operational and can be booked through our online booking system.
contact:
Dr. Horst Punzmann - Node Manager
Dr. Kaushal Vora - Operations and Processes Manager
Welcome to ANFF ACT node
"Our mission is to offer a state-of-the-art facility and processing capabilities open to all scientists and researchers in Australia and overseas, to help realise outstanding research for applications in optoelectronics, photonics and quantum technologies."
Please browse our website and feel free to contact us regarding any of our services, processes and capabilities and how they may be of benefit to your reseach, project or device/material development.
We look forward to working with you.
Horst Punzmann
