Laboratory and Equipment Resources

Please find relevant information below regarding Laboratory Safety, Tutorials, WHS documentation such as risk assessments and safe operating procdures WHS Procedures and Standard Process Recipes.

Laboratory Safety & Emergency Information

Before accessing the facilities all users must complete the induction webinar and complete the mandatory Laboratory Induction which MUST be completed and signed before access to the laboratory is granted. Please note, there will be an on-site laboratory tour to finish the induction.

It is also vital that all users familiarise themselves with the ANFF Laboratory Emergency Procedures as this document gives general information on the layout of the laboratories and associated facilities. There are also clear procedures on what to do in the event of any alarms being activated.

WHS Risk Assessments of Laboratories

The following table contains risk assessments (RA) and after-hours safe working procedures (AH_SWP) for our laboratories. Please familiarize youself and contact our process engineering staff if there are any questions.

Tutorials

Below are the links to tutorials covering nanofabrication techniques supported by our node. It covers introduction, theory and capapbilities of various tools.

Equipment Information

The following table contains equipment specific information on risks assessments (RA), safe working procedures (SWP), instruction manuals (IM) or, for reference if required, the equipment manufacturers manuals (e.g. hardware (MH), software (MS) or general equipment manual (MM). Please familiarize youself and contact our process engineering staff if there are any questions.

* Some equipment information contains manufacturers IP and is not publically available. Please contact ANFF staff to gain access to confidential information provided by the manufacturer/vendor.

Standard Process Recipes

Here is a list of typical fabricatioin process 'recipes' for a variety of tools. Please do not hesitate to consult our process engineers for advice on variations, to achieve the outcomes you require.

EBL Booking Policy

The use of the E-beam Lithography (EBL) system is quite heavy sometimes making it difficult to get a time-slot less than 1-2 weeks in advance. New rules have been formulated in order to use the system time more effectively. Please follow the following guidelines when making EBL bookings.

1. Weekdays are separated by two 4-hour sessions per weekday, morning 09:00-13:00 and afternoon 13:00-17:00. These two time slots put a cut-off at 13:00. If you need less time, please book only that time during each time-slot. Booking longer than 4 hours should either start at 9:00 (or earlier) or 13:00 (strict). Minimum 1hr for a booking.
   

2. More than one booking per user per day is NOT allowed.
   

3. After 17:00 bookings are more flexible which is very feasible for longer exposure. It will be very convenient if users doing overnight bookings could start as late as possible - e.g. starting at 19:00 would give other users opportunity to extend the afternoon session for longer exposures.
   

4. During weekends (Fri 18:00 - Mon 08:00) booking is fully flexible. Feel free to book any time slot of your choice.
   

5. Always report a booking that cannot be used AS SOON AS POSSIBLE! Use these mail addresses to reach to ANFF staff Gayatri.Vaidya@anu.edu.au or Kaushal.Vora@anu.edu.au

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